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公司名称:

旭豪真空科技有限公司

Shang Haur Vacuum

Technology Co.,Ltd

地址：台湾 236 新北巿

土城区大安路142号

邮编：23673

电话：886-2-8076 3000
传真：886-2-8076 3300
网站：www.shang-haur.com

联系人：徐建荣 MARK HSU
职位：经理
手机：886-932392460
Mail：sh.vacuum@msa.hinet.net

联系人：林永瑞 Jeff Lin
职位：销售经理
手机：886-937885946
Mail：jeff@sh-vacuum.com.tw

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涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300

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涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300

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型号：
TMP-B300
产品品牌：
SHIMADZU

产品描述

组合轴承

•长寿命轴承机构可降低维护成本。

•泵可与小型前级泵组合使用。

•泵可以任何方向安装。

磁性和陶瓷轴承的组合

专有的阻尼机构用于实现低振动和轴承冷却功能，另外还提供高可靠性和长使用寿命。

该泵可与小型前级泵结合使用。

涡轮叶片和分子拖曳泵的组合即使在高背压水平下也能实现超高真空。

如果与小型干式真空泵（如隔膜泵）结合使用，可以实现超高真空压力。

泵可以任何方向安装。

泵单元可以垂直，水平或倒置方向安装。

Standard Specifications

Turbo molecular pump model	TMP-B300
Cooling method	Convection	Forced air by cooling fan
Ultimate pressure(note 2)	After baking	−(note 1)	10-8 Pa order (note 2)
Non-baking	10-6 Pa order	10-6 Pa order
Pumping speed(note 3)	N2	280 L/s	280 L/s
He	270 L/s	270 L/s
H2	220 L/s	220 L/s
Compression ratio	N2	> 1 x 109	> 1 x 109
He	7×106	7×106
H2	1×105	1×105
Critical backing pressure	1500 Pa	1500 Pa
Maximum allowable continuous backing pressure(note 4)	N2	100 Pa (ambient < 35°C)	1000 Pa (ambient 25°C) 930 Pa (ambient 35°C)
Maximum allowable gas throughput at continuous pumping	10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C)	100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C)
weight	VG, ISO	6 kg	6.3 kg
ICF	9 kg	9.3 kg
Bearing type	Passive magnetic bearing and ceramic bearing
Inlet flange	VG100, DN100CF, ISO100K
Outlet port	KF16
Rated speed	60000 rpm
Stat-up time（up to 80 %）	3.5 minutes
Mounting direction	In any desired direction
Noise [Shimadzu's method](note 5)	≤ 50 dBA
Admissible ambient magnetic field	Radial direction	3 mT
Axial direction	15 mT
Input electric power	Voltage	DC24 V ± 5 %
Maximum power	180 W

(Note 1)Only pumps equipped with a CF flange and cooling fan can be baked.
(Note 2)When using a two-stage oil-sealed rotary pump as an auxiliary pump.
(Note 3)When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
(Note 4)Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
(Note 5)Measured for the ISO flange model.

销售方式：制造、批发、合作、服务、进口
销售目标市场：台湾、中国大陆、香港、新加坡
询价付款方式：T.T. 电汇、L/C 信用状

竞争特点
多样设计：旭豪真空科技有限公司提供涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300的多样化设计
涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300接受进行原厂委託设计制造ODM
涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300接受进行原厂委託代工制造OEM

Turbo molecular pump model	TMP-B300
Cooling method	Convection	Forced air by cooling fan
Ultimate pressure(note 2)	After baking	−(note 1)	10-8 Pa order (note 2)
Non-baking	10-6 Pa order	10-6 Pa order
Pumping speed(note 3)	N2	280 L/s	280 L/s
He	270 L/s	270 L/s
H2	220 L/s	220 L/s
Compression ratio	N2	> 1 x 109	> 1 x 109
He	7×106	7×106
H2	1×105	1×105
Critical backing pressure	1500 Pa	1500 Pa
Maximum allowable continuous backing pressure(note 4)	N2	100 Pa (ambient < 35°C)	1000 Pa (ambient 25°C) 930 Pa (ambient 35°C)
Maximum allowable gas throughput at continuous pumping	10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C)	100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C)
weight	VG, ISO	6 kg	6.3 kg
ICF	9 kg	9.3 kg
Bearing type	Passive magnetic bearing and ceramic bearing
Inlet flange	VG100, DN100CF, ISO100K
Outlet port	KF16
Rated speed	60000 rpm
Stat-up time（up to 80 %）	3.5 minutes
Mounting direction	In any desired direction
Noise [Shimadzu's method](note 5)	≤ 50 dBA
Admissible ambient magnetic field	Radial direction	3 mT
Axial direction	15 mT
Input electric power	Voltage	DC24 V ± 5 %
Maximum power	180 W