地址:台湾 236 新北巿
邮编:23673TMP-B300
SHIMADZU
Turbo molecular pump model | TMP-B300 | ||
---|---|---|---|
Cooling method | Convection | Forced air by cooling fan | |
Ultimate pressure(note 2) | After baking | −(note 1) | 10-8 Pa order (note 2) |
Non-baking | 10-6 Pa order | 10-6 Pa order | |
Pumping speed(note 3) | N2 | 280 L/s | 280 L/s |
He | 270 L/s | 270 L/s | |
H2 | 220 L/s | 220 L/s | |
Compression ratio | N2 | > 1 x 109 | > 1 x 109 |
He | 7×106 | 7×106 | |
H2 | 1×105 | 1×105 | |
Critical backing pressure | 1500 Pa | 1500 Pa | |
Maximum allowable continuous backing pressure(note 4) | N2 | 100 Pa (ambient < 35°C) | 1000 Pa (ambient 25°C) 930 Pa (ambient 35°C) |
Maximum allowable gas throughput at continuous pumping | 10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C) | 100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C) | |
weight | VG, ISO | 6 kg | 6.3 kg |
ICF | 9 kg | 9.3 kg | |
Bearing type | Passive magnetic bearing and ceramic bearing | ||
Inlet flange | VG100, DN100CF, ISO100K | ||
Outlet port | KF16 | ||
Rated speed | 60000 rpm | ||
Stat-up time(up to 80 %) | 3.5 minutes | ||
Mounting direction | In any desired direction | ||
Noise [Shimadzu's method](note 5) | ≤ 50 dBA | ||
Admissible ambient magnetic field | Radial direction | 3 mT | |
Axial direction | 15 mT | ||
Input electric power | Voltage | DC24 V ± 5 % | |
Maximum power | 180 W |
Turbo molecular pump model | TMP-B300 | ||
---|---|---|---|
Cooling method | Convection | Forced air by cooling fan | |
Ultimate pressure(note 2) | After baking | −(note 1) | 10-8 Pa order (note 2) |
Non-baking | 10-6 Pa order | 10-6 Pa order | |
Pumping speed(note 3) | N2 | 280 L/s | 280 L/s |
He | 270 L/s | 270 L/s | |
H2 | 220 L/s | 220 L/s | |
Compression ratio | N2 | > 1 x 109 | > 1 x 109 |
He | 7×106 | 7×106 | |
H2 | 1×105 | 1×105 | |
Critical backing pressure | 1500 Pa | 1500 Pa | |
Maximum allowable continuous backing pressure(note 4) | N2 | 100 Pa (ambient < 35°C) | 1000 Pa (ambient 25°C) 930 Pa (ambient 35°C) |
Maximum allowable gas throughput at continuous pumping | 10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C) | 100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C) | |
weight | VG, ISO | 6 kg | 6.3 kg |
ICF | 9 kg | 9.3 kg | |
Bearing type | Passive magnetic bearing and ceramic bearing | ||
Inlet flange | VG100, DN100CF, ISO100K | ||
Outlet port | KF16 | ||
Rated speed | 60000 rpm | ||
Stat-up time(up to 80 %) | 3.5 minutes | ||
Mounting direction | In any desired direction | ||
Noise [Shimadzu's method](note 5) | ≤ 50 dBA | ||
Admissible ambient magnetic field | Radial direction | 3 mT | |
Axial direction | 15 mT | ||
Input electric power | Voltage | DC24 V ± 5 % | |
Maximum power | 180 W |