地址:台湾 236 新北巿
邮编:23673Turbo molecular pump | TMP-X2905LMTC | |
---|---|---|
Inlet flange | VG250 / ISO250B | |
Outlet flange | KF40 | |
Cooling method | Water | |
Ultimate pressure (after baking) | 10-7 Pa order | |
Maximum allowable Argon gas flow rate (Note 1) | 800 mL/min (Note 2) (Pump's set temperature : 65 degrees C.) | |
Maximum allowable inlet pressure (N 2 continuous exhaust) (Note 1) | 40 Pa | |
Maximum allowable outlet pressure (N 2 continuous exhaust) (Note 1) | 270 Pa | |
Pumping speed (Note 3) | N2 | 2500 L/s |
Ar | 2400 L/s | |
H2 | 1800 L/s | |
Compression ratio | N2 | 2 x 108 |
H2 | 2 x 103 | |
Rated speed | 27600 rpm | |
Start-up time | 12 minutes or less | |
Mounting position | In any desired direction | |
Vibration level (by Shimadzu's method) | 0.05 µm or less (0- Peak) | |
Recommended pumping speed of backing vacuum pump in case of gas purge | 2000 L/min or more | |
Display | LED | POWER / ROTATION / TEMP.CONTROL / ALARM |
Communication | Contact | REMOTE (D-sub 25 pin female, Screw lock size UNC 4-40) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / NORMAL / ACC. / BRAKE / REMOTE / TEMP.STABLE / ALARM / WARNING |
Serial | RS-232C / RS-485 | |
Speed variation | Speed is variable between 25 % and 100 % of the rated speed (set as 0.1 %). | |
Water | Flow rate | 3 L/min or more |
Pressure | 0.2 to 0.4 MPa | |
Temperature | 19 to 30 degrees C. (above dew point) | |
Admissible ambient magnetic field | Radial direction | 3 mT |
Axial direction | 15 mT | |
Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
Maximum power | 2.1 kVA | |
Mass | 115 kg |
Turbo molecular pump | TMP-X2905LMTC | |
---|---|---|
Inlet flange | VG250 / ISO250B | |
Outlet flange | KF40 | |
Cooling method | Water | |
Ultimate pressure (after baking) | 10-7 Pa order | |
Maximum allowable Argon gas flow rate (Note 1) | 800 mL/min (Note 2) (Pump's set temperature : 65 degrees C.) | |
Maximum allowable inlet pressure (N 2 continuous exhaust) (Note 1) | 40 Pa | |
Maximum allowable outlet pressure (N 2 continuous exhaust) (Note 1) | 270 Pa | |
Pumping speed (Note 3) | N2 | 2500 L/s |
Ar | 2400 L/s | |
H2 | 1800 L/s | |
Compression ratio | N2 | 2 x 108 |
H2 | 2 x 103 | |
Rated speed | 27600 rpm | |
Start-up time | 12 minutes or less | |
Mounting position | In any desired direction | |
Vibration level (by Shimadzu's method) | 0.05 µm or less (0- Peak) | |
Recommended pumping speed of backing vacuum pump in case of gas purge | 2000 L/min or more | |
Display | LED | POWER / ROTATION / TEMP.CONTROL / ALARM |
Communication | Contact | REMOTE (D-sub 25 pin female, Screw lock size UNC 4-40) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / NORMAL / ACC. / BRAKE / REMOTE / TEMP.STABLE / ALARM / WARNING |
Serial | RS-232C / RS-485 | |
Speed variation | Speed is variable between 25 % and 100 % of the rated speed (set as 0.1 %). | |
Water | Flow rate | 3 L/min or more |
Pressure | 0.2 to 0.4 MPa | |
Temperature | 19 to 30 degrees C. (above dew point) | |
Admissible ambient magnetic field | Radial direction | 3 mT |
Axial direction | 15 mT | |
Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
Maximum power | 2.1 kVA | |
Mass | 115 kg |