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公司名称:旭豪真空科技有限公司
Shang Haur Vacuum Technology Co.,Ltd
 

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937885946
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SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵

数量:
  • TMP-403 Series
  • SHIMADZU
 SHIMADZU PUMP

TMP-403 Series  涡轮分子泵


•范围广,泵送吞吐量高
•支持数字电源
•各种监控功能
•已启用网络连接
•符合CE标志,SEMI S2和NRTL
 
Turbo Molecular PumpTMP-403 Series

宽范围和高泵送吞吐量
支持数字电源
各种监控功能
网络连接已启用
符合CE标志,SEMI S2和NRTL

Standard Specifications

Pump Main Unit

 

Turbo molecular pump TMP-403LM TMP-403LMC TMP-403M TMP-403MC
Inlet flange VG150 / ICF203 / ISO160B / ISO160C
Outlet flange KF25
Cooling method Water Cooling fan
Ultimate pressure (after baking)
(Note1)
10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order
Maximum allowable inlet pressure
(N2 continuous exhaust)
200 Pa 1.3 Pa
Maximum allowable outlet pressure 400 Pa 40 Pa
Pumping speed
(Note 2)
N2 420 L/s
He 360 L/s
H2 340 L/s
Compression ratio N2 1 x 109
He 8 x 104
H2 1 x 104
Rated speed 45000 rpm
Start-up time 5 minutes or less
Mounting position In any desired direction
Bake-out temperature at an inlet flange 120 degrees C. or less
Vibration level (by Shimadzu's method) 0.012 µm or less (0-pea)
Recommended flow rate of purge gas 20 to 30 mL/min (Note 3)
Recommended pumping speed of backing pump in case of gas purge 200 L/min or more
Environmental Temperatures 0 to 40 degrees C.
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 1 to 3 L/min -
Pressure 0.2 to 0.5 MPa
Temperature 5 to 30 degrees C.
Mass 14 kg
  • (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
  • (Note 2)Without a protective net. Pumping speed for N2 is 400 L/s with a protective net.
  • (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)

 

Power Supply Unit

 

Power supply unit EI-S04M
Battery Not Necessary
Exchangeable compatibility The control cable and the fan cable are interchangeable between any pump and power supply unit.
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Communication Contact

REMOTE (MR-34)

Input : START / STOP / RESET / LOW SPEED

Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING

Serial

Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6)

Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6)

Environmental conditions Temperature Operation 0 to 45 degrees C. (No dew condensation)
Relative humidity 40 to 80 %RH
Input electric power Voltage Single phase 100 to 120 VAC ± 10 % (50/60 Hz ± 2 Hz)
Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)
Maximum power 550 VA
Mass 8 kg


销售方式:制造、批发、合作、服务、进口
销售目标市场:台湾、中国大陆、香港、新加坡
询价付款方式:T.T. 电汇、L/C 信用状

竞争特点
多样设计:旭豪真空科技有限公司提供SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵的多样化设计
SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵接受进行原厂委託设计制造ODM
SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵接受进行原厂委託代工制造OEM
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