旭豪真空科技有限公司
ShangHaur Vacuum Technology
真空帮浦代理销售维修 | TEL:02-80763000 | Mail: sh.vacuum@msa.hinet.net
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地址：台湾 236 新北巿
邮编：23673TMP-V3304LM(F)
SHIMADZU
| Turbo molecular pump (Note 1) | TMP-V3304LM (F) | |
|---|---|---|
| Inlet flange | VG300 / ISO320B / VG350 | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 2) | 1500 mL/min (Note 3) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 2) | 7 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 2) | 270 Pa | |
| Pumping speed (Note 4)(Note 5) | N2 | 3200 L/s |
| Ar | 3100 L/s | |
| Compression ratio | N2 | 1×109 or more |
| He | 1×105 | |
| H2 | 6×103 | |
| Rated speed | 27600 rpm | |
| Start-up time | 16 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
| Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
| Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Water | Flow rate | 3 to 4 L/min |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 1.2 kVA | |
| Mass | 94 kg |
| Turbo molecular pump (Note 1) | TMP-V3304LM (F) | |
|---|---|---|
| Inlet flange | VG300 / ISO320B / VG350 | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 2) | 1500 mL/min (Note 3) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 2) | 7 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 2) | 270 Pa | |
| Pumping speed (Note 4)(Note 5) | N2 | 3200 L/s |
| Ar | 3100 L/s | |
| Compression ratio | N2 | 1×109 or more |
| He | 1×105 | |
| H2 | 6×103 | |
| Rated speed | 27600 rpm | |
| Start-up time | 16 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
| Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
| Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Water | Flow rate | 3 to 4 L/min |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 1.2 kVA | |
| Mass | 94 kg |
