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公司名称:旭豪真空科技有限公司
Shang Haur Vacuum Technology Co.,Ltd
 

地址:台湾 236 新北巿

土城区大安路142号

邮编:23673

电话:886-2-8076 3000
传真:886-2-8076 3300
网站:www.shang-haur.com

联系人:徐建荣 MARK HSU
职位:经理
手机:886-932392460
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sh.vacuum@msa.hinet.net

联系人:林永瑞 Jeff Lin
职位:销售经理
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937885946
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jeff@sh-vacuum.com.tw
 
 
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涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-3804LMC

数量:
  • TMP-3804LMC
  • SHIMADZU
涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-3804LMC

高泵送吞吐量类型
•最大泵送流量
•优异的耐腐蚀性
•紧凑型电源装置
•针对反应产物的措施(可选)
•各种监控功能
•已启用网络连接
•可变泵速
•降低功耗
•符合主要标准
•无调音
•无电池


高泵送吞吐量类型
真空和工业机械
•最大泵送流量
 
通过紧凑的机身实现高泵送吞吐量。
 
•优异的耐腐蚀性
 
由于在转子上使用分散电镀(TMP-4203LMC,TMP-3403LMC),因此耐腐蚀性气体。具有优异的热释放特性的分散电镀防止了由高泵送量引起的转子过热。
TMP-2203LMC和TMP-1303LMC的转子表面镀镍,以防止腐蚀性气体。
 
•紧凑型电源装置
 
与Shimadzu之前的型号相比,重量减轻了49%,重量减轻了50%
 
高泵送吞吐量类型
•针对反应产物的措施(可选)
 
添加用于控制加热器和冷却水到泵的功能允许其保持在高温下并防止反应产物积聚在其内部。温度控制器内置于紧凑型电源单元中。
 
•各种监控功能
 
前面板上的LCD显示当前,抽速,不平衡量,错误和其他信息。配备维护唿叫计时器。
前面板上配有RS-232C端口,以便在泵运行时将操作信息加载到计算机上。如果将条件与正常条件进行比较,您可以在早期阶段发现异常情况(由于附着的反应产物引起的背压增加等)。这有助于保护系统免受问题的影响并使其保持良好状态。
 
•已启用网络连接
 
配备符合RS-232C和RS-485标准的串行通信端口,可以启动/停止泵,监控运行状态和加载运行历史。使用一台计算机可以监控多达32个泵。
使用可选的监控软件,可以同时监控多个泵。
 
•可变泵速
 
泵速可在25%至100%的范围内设定,以调节泵的产量。速度设定可应用于腔室压力的调节。在给定条件下使用时,可以减少电导阀。
 
•降低功耗
 
•符合主要标准
 
CE标志,TÜV
NRTL(UL61010A-1)
SEMI S2
SEMI F47
SEMI E74
 
•无调音
 
在更换泵电缆时,不需要重新调整电源单元。
 
•无电池
 
在电源故障的情况下,使用再生电力维持磁悬浮,从而减少了触地轴承的磨损。


Maximum pumping flowrate

High pumping throughput is achieved with a compact body.

• Excellent corrosion resistance

Resistant to corrosive gas because dispersed plating is used on the rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent heat release characteristic prevents overheat of the rotor caused by high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.

• Compact power supply unit

49 % smaller and 50 % lighter as compared to Shimadzu's previous models

High Pumping Throughput Type

• Measures against reaction products (optional)

Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.

• Various monitoring functions

LCD on the front panel displays the current, pumping speed, unbalance amount, errors, and other information. Equipped with a maintenance call timer.
Equipped with a RS-232C port on the front panel so that operation information can be loaded on a computer while the pump is operating. You can find abnormalities (increase of back pressure due to an adhered reaction product, etc.) in early stages if you compare the condition with the normal condition. This helps to protect the system from problems and keep it in good condition.

• Network connection enabled

Equipped with RS-232C and RS-485 compliant serial communication ports, which enables operations to start/stop pumps, monitor operation status, and load operation history. Up to 32 pumps can be monitored using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.

• Variable pump speed

The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.

• Reduced power consumption

• Compliant with major standards

CE marking, TÜV
NRTL (UL61010A-1)
SEMI S2
SEMI F47
SEMI E74

• Tuning-free

Readjustment of the power supply unit is unnecessary during pump cable replacement.

• Battery-less

In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.

 

Standard Specifications

Pump Main Unit

 

Turbo molecular pump TMP-3804LMC
Inlet flange VG300 / ISO320B
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking) 10-7 Pa order
Maximum allowable Argon gas flow rate 2200 mL/min (Note 1)
Maximum allowable inlet pressure 40 Pa
Maximum allowable outlet pressure 270 Pa
Pumping speed
(Note 2)
N2 3800 L/s
Ar 3400 L/s
H2 2500 L/s
Compression ratio N2 1×109 or more
He 3×104
H2 2×103
Rated speed 24000 rpm
Start-up time 18 minutes or less
Mounting position In any desired direction
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended flow rate of purge gas 30 mL/min (Note 1)
Recommended pumping speed
of backing pump in case of gas purge
1500 L/min or more
Environmental Temperatures 0 to 40 degrees C.
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 2 to 4 L/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 25 degrees C.
Mass 115 kg
  • (Note 1)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
  • (Note 2)Without a protective net for VG300 flange. Pumping speed for N2 is 3450 L/s with a protective net.
Power Supply Unit

 

Power supply unit EI-R04M
Battery Not Necessary
Exchangeable compatibility The control cable is interchangeable between any pump and power supply unit.
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Communication Contact REMOTE (MR-34)
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING
Serial
Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6)
Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6)
Environmental conditions Temperature Operation 0 to 45 degrees C. (No dew condensation)
Relative humidity 40 to 80 %RH
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)
Maximum power 1.5 kVA
Mass 8 kg
 


销售方式:制造、批发、合作、服务、进口
销售目标市场:台湾、中国大陆、香港、新加坡
询价付款方式:T.T. 电汇、L/C 信用状

竞争特点
多样设计:旭豪真空科技有限公司提供涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-3804LMC的多样化设计
涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-3804LMC接受进行原厂委託设计制造ODM
涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-3804LMC接受进行原厂委託代工制造OEM
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