涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300
产品描述
涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300
组合轴承
•长寿命轴承机构可降低维护成本。
•泵可与小型前级泵组合使用。
•泵可以任何方向安装。
磁性和陶瓷轴承的组合
专有的阻尼机构用于实现低振动和轴承冷却功能，另外还提供高可靠性和长使用寿命。
该泵可与小型前级泵结合使用。
涡轮叶片和分子拖曳泵的组合即使在高背压水平下也能实现超高真空。
如果与小型干式真空泵（如隔膜泵）结合使用，可以实现超高真空压力。
泵可以任何方向安装。
泵单元可以垂直，水平或倒置方向安装。
Standard Specifications
| Turbo molecular pump model | TMP-B300 | ||
|---|---|---|---|
| Cooling method | Convection | Forced air by cooling fan | |
| Ultimate pressure(note 2) | After baking | −(note 1) | 10-8 Pa order (note 2) |
| Non-baking | 10-6 Pa order | 10-6 Pa order | |
| Pumping speed(note 3) | N2 | 280 L/s | 280 L/s |
| He | 270 L/s | 270 L/s | |
| H2 | 220 L/s | 220 L/s | |
| Compression ratio | N2 | > 1 x 109 | > 1 x 109 |
| He | 7×106 | 7×106 | |
| H2 | 1×105 | 1×105 | |
| Critical backing pressure | 1500 Pa | 1500 Pa | |
| Maximum allowable continuous backing pressure(note 4) | N2 | 100 Pa (ambient < 35°C) | 1000 Pa (ambient 25°C) 930 Pa (ambient 35°C) |
| Maximum allowable gas throughput at continuous pumping | 10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C) | 100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C) | |
| weight | VG, ISO | 6 kg | 6.3 kg |
| ICF | 9 kg | 9.3 kg | |
| Bearing type | Passive magnetic bearing and ceramic bearing | ||
| Inlet flange | VG100, DN100CF, ISO100K | ||
| Outlet port | KF16 | ||
| Rated speed | 60000 rpm | ||
| Stat-up time（up to 80 %） | 3.5 minutes | ||
| Mounting direction | In any desired direction | ||
| Noise [Shimadzu's method](note 5) | ≤ 50 dBA | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Input electric power | Voltage | DC24 V ± 5 % | |
| Maximum power | 180 W | ||
- (Note 1)Only pumps equipped with a CF flange and cooling fan can be baked.
- (Note 2)When using a two-stage oil-sealed rotary pump as an auxiliary pump.
- (Note 3)When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
- (Note 4)Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
- (Note 5)Measured for the ISO flange model.
销售方式：制造、批发、合作、服务、进口
销售目标市场：台湾、中国大陆、香港、新加坡
询价付款方式：T.T. 电汇、L/C 信用状
竞争特点
多样设计：旭豪真空科技有限公司提供涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300的多样化设计
涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300接受进行原厂委託设计制造ODM
涡轮分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300接受进行原厂委託代工制造OEM