涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-1103 Series
产品描述
涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-1103 Series
高压缩比型
高压缩比型
•氢压缩比为106
•带磁悬浮的无电池涡轮分子泵
•紧凑的泵体和电源单元
•无调音
•标准配备符合RS-232C标准的串行接口。
•符合CCE标志，SEMI-S2和NRTL轴承。
高压缩比型
真空和工业机械
•氢压缩比为106
溅射过程可防止有害的氢分压增加。也可以使用辅助泵。
•带磁悬浮的无电池涡轮分子泵
电源单元免维护。
•紧凑的泵体和电源单元
半机架式电源装置
•无调音
泵，电源装置和电缆可互换，易于更换。
•标准配备符合RS-232C标准的串行接口。
通过监控速度和电机电流，可以在早期阶段找到泵系统的异常情况。
•符合CCE标志，SEMI-S2和NRTL
Standard Specifications
Pump Main Unit
| Turbo molecular pump | TMP-1103LMP | TMP-1103LMPC | TMP-1103MP | TMP-1103MPC | |
|---|---|---|---|---|---|
| Inlet flange | VG200 / ICF253 / ISO200B | ||||
| Outlet flange | KF40 | ||||
| Cooling method | Water | Cooling fan | |||
| Ultimate pressure (after baking) (Note1) | 10-9 Pa order | 10-8 Pa order | 10-9 Pa order | 10-8 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 70 Pa | 1.3 Pa | |||
| Maximum allowable outlet pressure | 800 Pa | 270 Pa | |||
| Pumping speed (Note 2) | N2 | 1080 L/s | |||
| He | 1040 L/s | ||||
| H2 | 800 L/s | ||||
| Compression ratio | N2 | 109 | |||
| He | 107 | ||||
| H2 | 106 | ||||
| Rated speed | 36000 rpm | ||||
| Start-up time | 5 minutes or less | ||||
| Mounting position | In any desired direction | ||||
| Bake-out temperature at an inlet flange | 120 degrees C. or less | ||||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | ||||
| Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||||
| Environmental Temperatures | 0 to 40 degrees C. | ||||
| Admissible ambient magnetic field | Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow rate | 1 to 3 L/min | - | ||
| Pressure | 0.2 to 0.5 MPa | ||||
| Temperature | 5 to 30 degrees C. | ||||
| Mass | 32 kg or less | ||||
| Corrosion resistance coating of a rotor | N/A | Coating | N/A | Coating | |
- (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
- (Note 2)Without a protective net.
- (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
Power Supply Unit
| Power supply unit | EI-R04M | |||||||
|---|---|---|---|---|---|---|---|---|
| Battery | Not Necessary | |||||||
| Exchangeable compatibility | The control cable and the motor cable are interchangeable between any pump and power supply unit. | |||||||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |||||||
| Communication | Contact | REMOTE (MR-34)
| ||||||
| Serial |
| |||||||
| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) | ||||||
| Relative humidity | 40 to 80 %RH | |||||||
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) | ||||||
| Maximum power | 1.0 kVA | |||||||
| Mass | 8 kg |
销售方式：制造、批发、合作、服务、进口
销售目标市场：台湾、中国大陆、香港、新加坡
询价付款方式：T.T. 电汇、L/C 信用状
竞争特点
多样设计：旭豪真空科技有限公司提供涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-1103 Series的多样化设计
涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-1103 Series接受进行原厂委託设计制造ODM
涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-1103 Series接受进行原厂委託代工制造OEM