SHIMADZU TMP-V3304LM(F) Turbo Molecular Pump 涡轮分子泵
产品描述
SHIMADZU PUMP
•带集成电源的TMP
TMP-V3304LM（F）
带集成电源单元的类型
•紧凑
•节能
•无需安装电缆或使用控制架
•改善泵送性能
•由于直接输入交流电源，因此无需单独供电。
•带集成电源的TMP
由于直接输入交流电源，因此无需单独的电源。
•紧凑，高抽速
在比Shimadzu之前的型号小一个尺寸的车身上实现了高抽速。
•可变泵速
泵速可设定在25％至100％的范围内。
Standard Specifications
| Turbo molecular pump (Note 1) | TMP-V3304LM (F) | |
|---|---|---|
| Inlet flange | VG300 / ISO320B / VG350 | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 2) | 1500 mL/min (Note 3) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 2) | 7 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 2) | 270 Pa | |
| Pumping speed (Note 4)(Note 5) | N2 | 3200 L/s |
| Ar | 3100 L/s | |
| Compression ratio | N2 | 1×109 or more |
| He | 1×105 | |
| H2 | 6×103 | |
| Rated speed | 27600 rpm | |
| Start-up time | 16 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
| Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
| Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Water | Flow rate | 3 to 4 L/min |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 1.2 kVA | |
| Mass | 94 kg |
- (Note 1)(F) apply ferromagnetic steel with nickel plating.
- (Note 2)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
- (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 4)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.
- (Note 5)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.
销售方式：制造、批发、合作、服务、进口
销售目标市场：台湾、中国大陆、香港、新加坡
询价付款方式：T.T. 电汇、L/C 信用状
竞争特点
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