日本 涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-X3405 Series
产品描述
日本 涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-X3405 Series
TMP- X3405系列
带集成电源单元的类型
•紧凑
•节能
•无需安装电缆或使用控制架
•改善泵送性能
•由于直接输入交流电源，因此无需单独供电。
•紧凑
高度比之前型号（TMP-V3304）低15％，带有集成电源装置。
•节能
与使用单独电源装置（无负载）的先前型号相比，功耗约低15％。
•支持硬流程
由于温度调节功能和改进的电机驱动输出，泵甚至可以在存在反应产物和使用腐蚀性气体的过程中使用。
Standard Specifications
| Turbo molecular pump | TMP-X3405LMTC | |
|---|---|---|
| Inlet flange | VG300 / ISO320B / VG350 | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 1) | 800 mL/min (Note 2) (Pump's set temperature : 65 degrees C.) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 1) | 40 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 1) | 270 Pa | |
| Pumping speed (Note 3) | N2 | 3200 L/s |
| Ar | 3100 L/s | |
| H2 | 2150 L/s | |
| Compression ratio | N2 | 2 x 108 |
| H2 | 2 x 103 | |
| Rated speed | 27600 rpm | |
| Start-up time | 12 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.05 µm or less (0-peak) | |
| Recommended pumping speed of backing vacuum pump in case of gas purge | 2000 L/min or more | |
| Display | LED | POWER / ROTATION / TEMP.CONTROL / ALARM |
| Communication | Contact | REMOTE (D-sub 25 pin female, Screw lock size UNC 4-40) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / NORMAL / ACC. / BRAKE / REMOTE / TEMP.STABLE / ALARM / WARNING |
| Serial | RS-232C / RS-485 | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed (set as 0.1 %). | |
| Water | Flow rate | 3 L/min or more |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 2.1 kVA | |
| Mass | 89 kg |
- (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
- (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 3)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.
销售方式：制造、批发、合作、服务、进口
销售目标市场：台湾、中国大陆、香港、新加坡
询价付款方式：T.T. 电汇、L/C 信用状
竞争特点
多样设计：旭豪真空科技有限公司提供日本 涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-X3405 Series的多样化设计
日本 涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-X3405 Series接受进行原厂委託设计制造ODM
日本 涡轮分子泵 SHIMADZU Turbo Molecular Pump TMP-X3405 Series接受进行原厂委託代工制造OEM