SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵
产品描述
SHIMADZU PUMP
销售方式:制造、批发、合作、服务、进口
销售目标市场:台湾、中国大陆、香港、新加坡
询价付款方式:T.T. 电汇、L/C 信用状
竞争特点
多样设计:旭豪真空科技有限公司提供SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵的多样化设计
SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵接受进行原厂委託设计制造ODM
SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵接受进行原厂委託代工制造OEM
TMP-403 Series 涡轮分子泵
•范围广,泵送吞吐量高
•支持数字电源
•各种监控功能
•已启用网络连接
•符合CE标志,SEMI S2和NRTL
Turbo Molecular Pump TMP-403 Series 宽范围和高泵送吞吐量
支持数字电源
各种监控功能
网络连接已启用
符合CE标志,SEMI S2和NRTL
Standard Specifications
Pump Main Unit
Turbo molecular pump | TMP-403LM | TMP-403LMC | TMP-403M | TMP-403MC | |
---|---|---|---|---|---|
Inlet flange | VG150 / ICF203 / ISO160B / ISO160C | ||||
Outlet flange | KF25 | ||||
Cooling method | Water | Cooling fan | |||
Ultimate pressure (after baking) (Note1) | 10-8 Pa order | 10-7 Pa order | 10-8 Pa order | 10-7 Pa order | |
Maximum allowable inlet pressure (N2 continuous exhaust) | 200 Pa | 1.3 Pa | |||
Maximum allowable outlet pressure | 400 Pa | 40 Pa | |||
Pumping speed (Note 2) | N2 | 420 L/s | |||
He | 360 L/s | ||||
H2 | 340 L/s | ||||
Compression ratio | N2 | 1 x 109 | |||
He | 8 x 104 | ||||
H2 | 1 x 104 | ||||
Rated speed | 45000 rpm | ||||
Start-up time | 5 minutes or less | ||||
Mounting position | In any desired direction | ||||
Bake-out temperature at an inlet flange | 120 degrees C. or less | ||||
Vibration level (by Shimadzu's method) | 0.012 µm or less (0-pea) | ||||
Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||||
Recommended pumping speed of backing pump in case of gas purge | 200 L/min or more | ||||
Environmental Temperatures | 0 to 40 degrees C. | ||||
Admissible ambient magnetic field | Radial direction | 3 mT | |||
Axial direction | 15 mT | ||||
Water | Flow rate | 1 to 3 L/min | - | ||
Pressure | 0.2 to 0.5 MPa | ||||
Temperature | 5 to 30 degrees C. | ||||
Mass | 14 kg |
Power Supply Unit
Power supply unit | EI-S04M | |
---|---|---|
Battery | Not Necessary | |
Exchangeable compatibility | The control cable and the fan cable are interchangeable between any pump and power supply unit. | |
Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
Communication | Contact | REMOTE (MR-34) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING |
Serial | Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6) Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6) | |
Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) |
Relative humidity | 40 to 80 %RH | |
Input electric power | Voltage | Single phase 100 to 120 VAC ± 10 % (50/60 Hz ± 2 Hz) |
Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) | ||
Maximum power | 550 VA | |
Mass | 8 kg |
销售方式:制造、批发、合作、服务、进口
销售目标市场:台湾、中国大陆、香港、新加坡
询价付款方式:T.T. 电汇、L/C 信用状
竞争特点
多样设计:旭豪真空科技有限公司提供SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵的多样化设计
SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵接受进行原厂委託设计制造ODM
SHIMADZU Turbo Molecular Pump TMP-403 Series 涡轮分子泵接受进行原厂委託代工制造OEM