Agilen 涡轮分子泵浦
产品描述
Turbo-V Pump
涡轮分子泵浦
涡轮分子泵浦
| Model | | Turbo-V 81 M | | Turbo-V 81 T | | Turbo-V 301 Navigator | |
| | DN 40 | DN 63 | DN 40 | DN 63 | DN 100 | DN 160 | |
| Pump Specification | | | | | | | |
| Pumping speed*, l/s | Nitrogen | 50 | 77 | 50 | 77 | 250 | 280 |
| Helium | 56 | 65 | 56 | 65 | 220 | 230 | |
| Hydrogen | 46 | 50 | 46 | 50 | 200 | 210 | |
| Compression Ratio | Nitrogen | 3x108 | 7x106 | 7x108 | 7x108 | 7x108 | 7x108 |
| Helium | 8x104 | 8x104 | 3x103 | 3x103 | 1x106 | 1x106 | |
| Hydrogen | 7x105 | 7x103 | 3x102 | 3x102 | 1x104 | 1x104 | |
| Base pressure, mbar | with recommended mechanical pump | 5x10-10 | 5x10-10 | 5x10-9 | 5x10-9 | <5x10-10 | <5x10-10 |
| with recommended dry pump | 5x10-9 | 5x10-9 | 5x10-8 | 5x10-8 | <5x10-9 | <5x10-9 | |
| Rotational Speed, rpm | | 80000 | 800000 | 800000 | 800000 | 56000 | 56000 |
| Recommended Forepump | Two-stage mechanical pump | DS42/DS102 | DS42/DS102 | DS42/DS102 | DS42/DS102 | DS42/DS102 | DS102 |
| Dry pump | SH-110 | SH-110 | SH-110 | SH-110 | SH-110 | SH-110 | |
| Klamp Flange | NW16 | NW16 | NW16 | NW16 | NW16 | NW16 | NW16 |
| Model | | Turbo-V 1001 Navigator | | | Turbo-V 1K-G | | Turbo-V 2K-G System | Turbo-V 3K-G System |
| | DN 160 | DN 200 | DN 250 | DN 160 | DN 200 | DN 250 | DN 250 | |
| Pump Specification | | | | | | | | |
| Pumping speed*, l/s | Nitrogen | 790 | 950 | 1050 | 810 | 1080 | 1600 | 2200 |
| Helium | 820 | 870 | 900 | 950 | 1150 | | | |
| Hydrogen | 860 | 900 | 920 | 680 | 730 | | | |
| Compression Ratio | Nitrogen | 1x109 | 1x109 | 1x109 | > 5x107 | > 5x107 | 3x106 | >1x107 |
| Helium | 1x107 | 1x107 | 1x107 | > 4x104 | > 4x104 | | | |
| Hydrogen | 1x106 | 1x106 | 1x106 | 1.5x104 | 1.5x104 | | | |
| Base pressure, mbar | with recommended mechanical pump | <1x10-10 | <1x10-10 | <1x10-10 | <1x10-10 | <1x10-10 | <1x10-8 | <1x10-9 |
| with recommended dry pump | <1x10-10 | <1x10-10 | <1x10-10 | <1x10-10 | <1x10-10 | <1x10-8 | <1x10-9 | |
| Rotational Speed, rpm | | 38000 | 38000 | 38000 | 456600 | 456600 | 33000 | 31800 |
| Recommended Forepump | Two-stage mechanical pump | DS102 | DS402 | DS402 | DS402 | > 20 m3/h > 36 m3/h | > 40 m3/h | > 60 m3/h |
| Dry pump | SH-110 | TS300 | TS300 | TS300 | | | | |
| Klamp Flange | NW16 | NW40 | NW40 | NW40 | NW25 | NW40 | NW40 | NW40 |